全自動(dòng)硅片插片清洗機(jī)是專(zhuān)為全自動(dòng)清洗硅片設(shè)計(jì)的,通過(guò)一臺(tái)自動(dòng)插片機(jī)自動(dòng)插片，插片后采用一臺(tái)機(jī)械手將插片后的花籃（100片/籃）送入清洗機(jī)清洗，清洗結(jié)束后采用一臺(tái)工業(yè)機(jī)器人將花籃送到自動(dòng)檢片機(jī)上料位，檢片結(jié)束后機(jī)器人將空花籃放到花籃輸送機(jī)構(gòu)，花籃輸送機(jī)構(gòu)將空花籃送到插片機(jī)機(jī)上料端，工人操作只需保證插片機(jī)上料槽內(nèi)有硅片即可。清洗機(jī)生產(chǎn)主線共11個(gè)工位，其工作原理是利用超聲波滲透力強(qiáng)的機(jī)械振動(dòng)沖擊硅片表面并結(jié)合清洗劑的化學(xué)去污作用達(dá)到對(duì)硅片表面附著的碳化硅、硅粉、金屬粉末、油污、懸浮液等雜質(zhì)的清除，從而獲得表面潔凈的硅片。本設(shè)備電氣控制部分關(guān)鍵件均采用進(jìn)口優(yōu)質(zhì)件，性能可靠，使用壽命長(zhǎng)，具有工位記憶功能，單臂小車(chē)運(yùn)行平穩(wěn)，動(dòng)作迅速、可靠；頂部設(shè)有吸風(fēng)口，為防止污染空氣，用戶需外接風(fēng)管抽風(fēng)。

The fully automatic silicon wafer insertion cleaning machine is designed specifically for fully automatic cleaning of silicon wafers. It uses an automatic insertion machine to automatically insert wafers. After insertion, a mechanical arm is used to send the inserted flower basket (100 wafers/basket) into the cleaning machine for cleaning. After cleaning, an industrial robot is used to send the flower basket to the feeding position of the automatic wafer inspection machine. After the inspection is completed, the robot places the empty flower basket into the flower basket conveying mechanism, The flower basket conveying mechanism sends the empty flower basket to the feeding end of the insertion machine, and workers only need to ensure that there are silicon wafers in the feeding groove of the insertion machine. The main production line of the cleaning machine consists of 11 workstations. Its working principle is to use the strong mechanical vibration of ultrasonic penetration to impact the surface of silicon wafers and combine it with the chemical cleaning effect of cleaning agents to remove impurities such as silicon carbide, silicon powder, metal powder, oil stains, suspension, etc. attached to the surface of silicon wafers, thereby obtaining a clean surface of silicon wafers. The key components of the electrical control part of this equipment are all imported high-quality components, with reliable performance, long service life, and station memory function. The single arm trolley runs smoothly, moves quickly, and is reliable; There is a suction port at the top, and to prevent air pollution, users need to connect an external air duct for ventilation.

清洗流程：上料臺(tái)→ 1#超聲波鼓泡槽（電加熱+溫控+過(guò)濾）→2#超聲波堿洗槽（電加熱+溫控+過(guò)濾）→3#超聲波堿洗槽（電加熱+溫控+過(guò)濾）→4#超聲波堿洗槽（電加熱+溫控+過(guò)濾）→5#超聲波漂洗槽（電加熱+溫控+過(guò)濾）→6#超聲波漂洗槽（電加熱+溫控+過(guò)濾）→7#超聲波漂洗槽（電加熱+溫控+過(guò)濾）→8#超聲波漂洗槽（電加熱+溫控+過(guò)濾）→9#慢拉脫水槽→10#烘干槽→11#冷風(fēng)吹干槽→出料機(jī)構(gòu)

Cleaning process: Loading table → 1 # ultrasonic bubbling tank (electric heating+temperature control+filtration) → 2 # ultrasonic alkali washing tank (electric heating+temperature control+filtration) → 3 # ultrasonic alkali washing tank (electric heating+temperature control+filtration) → 4 # ultrasonic alkali washing tank (electric heating+temperature control+filtration) → 5 # ultrasonic rinsing tank (electric heating+temperature control+filtration) → 6 # ultrasonic rinsing tank (electric heating+temperature control+filtration) → 7 # ultrasonic rinsing tank (electric heating+temperature control+filtration) → 8 # ultrasonic rinsing tank (electric heating+temperature control+filtration) → 9 # slow pulling water tank → 10 # drying tank → 11 # cold air drying tank → discharge mechanism

超聲波清洗機(jī)是利用超聲波空化的原理，當(dāng)超聲波形成的氣泡突然破裂的瞬間產(chǎn)生1000個(gè)大氣壓，產(chǎn)生強(qiáng)烈的沖擊波代替人手工搓洗，使被清洗物體表面的污物遭到破壞，并迅速脫落，因?yàn)槌暡梢源┩腹腆w物質(zhì)而使整個(gè)液體介質(zhì)振動(dòng)并產(chǎn)生空化氣泡，因此這種清洗方式不存在清洗死角，實(shí)踐證明，超聲波清洗的潔凈度高。

Ultrasonic cleaning machine is based on the principle of ultrasonic cavitation. When the bubbles formed by ultrasonic waves suddenly burst, 1000 atmospheres of pressure are generated, generating a strong shock wave to replace manual scrubbing. This causes the dirt on the surface of the cleaned object to be damaged and quickly fall off, because ultrasonic waves can penetrate solid substances and cause the entire liquid medium to vibrate and produce cavitation bubbles. Therefore, this cleaning method does not have a dead angle for cleaning. Practice has proven that, The cleanliness of ultrasonic cleaning is high.

由于超聲波的能夠穿透細(xì)微的隙縫和小孔，所以超聲波可以適合不規(guī)則形狀的器皿進(jìn)行清洗。

Due to its ability to penetrate fine gaps and small holes, ultrasound can be suitable for cleaning irregularly shaped vessels.

超聲清洗相對(duì)常規(guī)清洗方法在除垢方面要快得多，超聲清洗可節(jié)省勞動(dòng)力的優(yōu)點(diǎn)，使其成為經(jīng)濟(jì)的清洗方式。

Ultrasonic cleaning is much faster in descaling compared to conventional cleaning methods, and its advantage of saving labor makes it an economical cleaning method.

無(wú)論清洗對(duì)象是大是小，簡(jiǎn)單還是復(fù)雜，使用超聲波清洗都可以獲得比手工清洗更高的潔凈度。應(yīng)用優(yōu)勢(shì)，在所有的清洗方式中，吉?jiǎng)?chuàng)超聲波清洗是效率高，效果好的一種，之所以超聲波能夠達(dá)到如此的效果，是與它的工作原理和清洗方式密切相關(guān)的，清洗效果好且塊，省時(shí)省力省人工。

Regardless of whether the cleaning object is large or small, simple or complex, using ultrasonic cleaning can achieve higher cleanliness than manual cleaning. Application advantages: Among all cleaning methods, Jichuang ultrasonic cleaning is a highly efficient and effective one. The reason why ultrasonic cleaning can achieve such results is closely related to its working principle and cleaning method. The cleaning effect is good and blocky, saving time, effort, and labor.

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